Study On The Preparation,Properties And Application On LED Of AlN Thin Films

Due to good chemical stability and electrical resistivity, high thermal conductivity and mechanical intensity, wide band gap and low thermal expansion coefficient, AlN thin films can be applied for insulating chips for semiconductor devices with high power, thermal dissipation lagers for large and super-large scale integrated circuits, insulating layers or passivation layers for semiconductor. For its excellent optical properties, AlN can be also used in ultraviolet optical components with high power for thermal conductivity material.AlN thin film was prepared from a 99.999% pure aluminum target by DC and AF reactive magnetron sputtering in nitrogen gas mixed with argon gas. The transmission spectrum of samples has been measured. The transmission of AlN films increase, when the working pressure arises. Distance of target and substrate get longer also increase the transmission of AlN films. As the temperature of substrate get higher, the transmission of AlN films decrease slightly. Nitrogen gas concentration and sputtering time barely take effect on the transmission of AlN films. The optimal condition in preparation procession was also proposed. With the XRD spectrum, it shows the AlN thin films have orientation growth with (002) and (101).The breakdown voltage of AlN thin films have been measured by 105C withstanding voltage tester instrument , meanwhile the thermal conductivity of samples has been measured by TC-7000 laser instrument of YanShan university.we can draw a conclusion that: a certain annealed temperature can increase the breakdown voltage, AlN thin films with optimal breakdown voltage is 7.5MV/cm.In the last part of this thesis, the thermolysis efficiency of LED has been studied. Two points in LED have been chosen for temperature measurement. From the simulate experiment on assembled LED, Following result has been obtained after the study of heating curves. The AlN thin films on LED integrated circuit(IC) board can increase the thermolysis efficiency of LED. The higher thermal conductivity of AlN thin films shows that the higher thermolysis efficiency can obtained. The data can offer reference for AlN thin films applying in LED packing.