Fabrication Of Nano Mold And Polymer Nanofluidic Chip Based On UV Lithography

The development of nanofluidics is based on the fabrication of nanochannels. A novel method for fabricating polymer nanochannels is described. First, a new process named second oxidation after etching (SOAE) is developed to fabricate a silicon "mother" mold based on UV lithography. Secondly, several polymethyl methacrylate (PMMA) "daughter" molds are hot embossed by using the silicon mother mold. Finally, the polyethylene terephthalate (PET) nanochannels are transferred from the PMMA daughter mold by hot embossing.The parameters for developing of photoresist, etching of silicon oxide, dry etching of silicon and oxidation that are included in the process of SOAE, are optimized respectively. Analyze and solve the entire process of production appears lateral erosion problems, dry etching parameter selection problems and the relationship between oxidation and time. In the use of hot-embossing for delivery of graphics, analyze the specific parameters of the hot-embossing and select the best parameters. A PET array-nanochannel with 720nm width and 290nm depth is fabricated by using this method.A U-shaped microchannel compared with the fit array-nanochannel is produced and successfully achieved for channels bonding.