Theoretical And Experimental Studies On Generating Of High Concentration Ozone Gas

The facility structure optimization, the experimental studies of ozone generation equipment of high concentration, as well as the theoretical discussion of strong ionization discharge of dielectric barrier are introduced in this paper. This thesis is supported by the projects as follows: the key and general projects of National Natural Science Foundation of China, the "Studies on methods and applications of gas ionization with strong electric field under high pressure" (No. 60031001) and the "Studies on gas molecule ionization by ultra-strong electric field and its applications" (No.69871002), as well as the international co-operation projects in LiaoNing Province, "the development of ozone generating equipment of GGD type with high concentration and high efficiency" (No.98220013),The method of strong ionization discharge of dielectric barrier and its plasma reaction process of ozone generation are discussed in this paper. The design of ozone generator has been optimized by experiment. The reduced field, as a main parameter, is increased with the methods as follows: the dielectric layers of high dielectric constant and high-resistivity; the decrease of discharge gap and the cooling electrodes. So the ozone concentration and generation efficiency could be raised greatly.Strong ionization discharge in discharge gap could be gained with the reduced field (E/n) of 400Td, the average electron energy of 10 eV and the electron density of 1015/cm3. The ozone generator of miniaturization and modularization is developed with the ozone concentration of 200g/Nm3 and the generation efficiency of 100 g/kWh for 100 g/h ozone device.Some theoretical studies of strong ionization discharge of dielectric barrier are carried out. The Plasma chemical reaction of ozone generation could be controlled by adjusting parameters of dielectric barrier discharge (E/n, Te). It is a potential ozone generation technology for extensive use in the future.