Studies On Computer Controlled Optical Finishing For Large Aperture High Precision Optics

As the driver of the Inertial Confinement Fusion (ICF), the high power solid-state laser employs a lot of large aperture optical components. To guarantee the safe function, the fabrication quality is a key problem, which is also the precondition of the high quality laser beam. In this dissertation, computer controlled optical finishing using for large aperture optical components, i.e. piano optics, corrector, and aspherical lens has been studied. The main results have been summarized as follows:1. The principle of polishing optical glass has been studied. For traditional and number controlled polishing process, mechanical effect is capital, chemical effect is important, orheological effect is existent. The remove of the polishing is result of integrate all three effect. The theory of computer controlled optical finishing has been studied, the removal function of the material and devall function has been studied.2. For polishing piano optics, the moving of computer controlled machine and removal function has been studied; the Russia technical program has been studied; two kind of technical programs has been made, which special designed for our optical measure system. We get good result in fabrication by using these two technical programs. The process and result of fabrication high diameter to thick ratiofused silica window has been introduced.Now the piano computer controlled optical finishing technics which has been done was main technics for polishing piano optics in Shenguang III prototype. It can achieve 1/6. (PV) single transmitted wave front error for windows and 1/8. (PV) surface error for mirror.3. Based on characteristics of piano computer controlled optical finishing technics, CCOS has been employed for correcting static wave front error of high power solid laser facility. The combination of wave front error has been done. The scheme of proving the effect has been designed. The work proved the feasibility of the technical idea. This work had win4. CCOS for aspherical lens has been done. The moving style of computer controlled machine has been studied. Based on the moving of machine and characteristics of the lens, the polish moving style has been designed. The influence on measure result which caused by errors in different process stage has been studied. The error in measure and in fabrication has been studied and separated efficiently, which guarantee the guidance for fabrication. The technical program has been made. Good result in fabrication asphercial lens has been get by using these technology.The technics of CCOS for aspherical lens was main technics for polishing aspherical lens in Shenguang III prototype. It can achieve 1/3 (PV) single transmitted wave front-error and 1.2nm (RMS) of surface roughness. It is the same level as NIF in USA.