Studying On The Machining Technology Of 3D Electrochemical Micromaching

With the development of the Micro Electro Mechanical System(MEMS), mico-machining technologies grows rapidly . Electrochemical micromachining technology owns its advantages as high machining efficiency, low cost, wide materials suit to fabricate, no residual stress and no heat treatment borne on the workpices surface, should occupy an important position in the micromachining domain.A new electrochemical micromaching setup was designed and manufactured, which contains 3 liner motion systems and 2 rotator shaft systems, driven by step motors. This setup can realize the fabrication of electrodes with the methods of generating machining and all the electrodes can be fabricated on machine.Controlled by the computer, The tool electrode or the workpiece can move along an appointed track. The gap between the electrodes can be self-adaptive controlled by detecting the voltage or the current changes during the machining duration.With the application of the high-frenquecy-short-pulse power supply, its frequency can reach 125K Hz, Series tests have been performed to study the rules of electrochemical micromaching about the machining efficency, machinine precision, surface condition etc. while the parameters of machining gap, machining duration, the electrolyte types (NaCl, NaN03, NaC103, etc.) and consistence, the voltage ,the pulse duration and the duty factor, etc. have been changed.Based on the fundamental test, some holes were machined with different machining velocity to study the their taper.Some workpiece including tool electrode were fabricated on machine using different machining methods. A new fabrication process about tool electrode made on machine was present.