The Research On Excimer Laser Ethcing Hollow Glass Micro-spheres

Perturbation target is an important part of ICF(Inertial Confinement Fusion) experiment. As the research on Rayleigh-Taylor Unstability goes further, surface perturbation target does not feed the requirement of relative experiments any more, and micro-spheres which have perturbing images on the surface serve as perturbation target are needed for the new circumstances.The techniques of micro-fabrication and perturbation target were introduced first in this paper. The micro-fabrication techniques on hard and fragile materials such as glass, the manufacturing techniques and the properties of HGM(Hollow Glass Micro-spheres) as the material of micro-sphere perturbation target were analyzed. Also the rough information of the 248 nm KrF excimer laser which was used in this project was introduced. Some successful examples using this excimer laser in micro-fabrication were also presented.Based on the analyzation of the properties of HGM and the BDS(Beam Delivery System) of the 248 nm KrF excimer laser, several problems of etching glass micro-spheres utilizing excimer laser were discussed, and several experiments of etching glass chips were successfully carried out. After analyzing the results of the above mentioned experiments, a new process etching glass micro-spheres with 248 nm excimer laser was introduced, and successfully carried out in lab experiments.Finally, the results of etching HGM with 248 nm KrF excimer laser were discussed, and several suggestions were given for further research work in the future.