Research On Nanofabrication By Modulating Pulse Voltage Based On AFM

The final aim of Nanotechnology is to fabricate special functional apparatus. Fabrication of nanostructure is the base of the nanofabrication technology. It has become a problem for urgent resolution in the area of the current world research. Scanning probe microscope( SPM) has expanded the space of the surface information research consumedly, it will have the huge push function to the development of Nanotechnology.Being an important branch of the nanofabrication technology on SPM, electron beam nanolithography based on AFM is not just very mature in the theories and experiments, needs the further research and investigation.The dissertation studyies and analyzes naofabrication technology based on AFM in the air to expect to find a good method of nanofabrication.Using this kind of method,we have faster speed of fabrication and accept good properties oxidable structure. Main research contents in the dissertation are:...