Nanometer Process Technology And Software Systems Based On Atomic Force Microscope Study

Micro-machining technology is a newly rising modern fabrication technology, which is widely applied in micro-electronic instrument fabrication, high-precision detection technology and nano-materials fabrication. Micro-machining is an extensive concept including machining, chemical etching, energybeam lithograhpy and SPM fabrication. The new SPM-based nano-fabrication tech is renascent and promising developing, with the envolvement of SPM family. SPM, with resolution at the atomic level, can be used for not only detection of different samples in different enviorments, but also nano-fabrication. To develop reliable nano-fabrication system, many research institutions and incoporations have plunged high investment into this field, and all kinds of systems based on AFM, STM, SNOM and so on, come into reality. They are widely applied, with excellent performance, and very very expensive and complicated as well. In this case, we determine to develop an effective nano-fabrication system with low cost, and make it more easily and widely used in scientific research. The main content and innovation of this thesis is descibed as follows.The mechanism of the interaction of the tip of AFM and sample is deeply researched. With the analysis of force of atoms of the tip and the sample, the whole process of the sliding of tip on the surface of sample is modelled and simulated with molecular dynamics analysis.A new method of nanomaching is presented. Of the method, theoretical analysis and calculation, the relationship of all the parameters of machining is done, such as load, matierial, cantilevel and scanning path and result including depth, width and efficiency.A new probe station, load tuning structure and stepping structure is designed, and these works make nano-fabrication easy and feasible.Nonlinearities of the piezo tube is analysised and a new calibration method based on BP neural network, is presented.The whole software system for AFM scanning/nanomaching is developed, with utilities of stepping control, scan/scratching mode switch, path control and data processing.With many ways of optimization, the performance of the system is improved much, It is determined by many experiments that the system is realible with high repeatability, good stability.The lateral resolution of the system is better thatn 1 nm, and the vertical resoution better thatn 0.1nm as well, covering a wide scan/scratching range up to 8000x8000nm.