The Preparation And Characteristics Of Nanocrystalline Titanium Dioxide Thin Films By Arc Ion Plating Technique

In this paper, TiO₂ thin films were successfully prepared on microscope slides by arc ion plating technique.The microstructure, surface morphology and UV-visible absorption spectrum of the films were investigated by AFM, XRD, Raman spectroscopy and UV-1800 spectrophotometer, thus analyzing the effect of the annealing treatment on the microstructure, the crystal size, the flatness and the absorption coefficient of TiO₂ film.The TiO₂ thin films showed good photocatalytic activity for decomposing of Phenol, Methyl Orange, Rhodamine, and Methylene Blue. The photodegradation of organic compounds was more prominent with the anatase TiO₂ film annealed at 500℃ than the amorphous TiO₂ film. Hydrophilic experiments by using fixed quantify water-analyzing method showed the nanometer anatase TiO₂ film with high hydrophilicity.The experimental results showed that the TiO₂ films prepared by ion plating technique were compact, uniform and transparent. The anatase structure TiO₂ films after annealing at 500℃ for two hours have higher activity than the amorphous films without annealing.