Experiment Investigating On Mechanism Of Nano-machining, Nano-scale Structure Generating And Measuring For Surface

The final aim of nanotechnology is to fabricate specified functional products onthe nanometer scale. But the conventional theories can't explain the phenomena ofnanomachining,so it is exigent to investigate mechanism of nanomachining. Atpresent , molecular dynamics (MD) simulation technique and Scanning ProbeMicroscope (SPM) technique are employed widely to investigate mechanism ofnanomachining and nanofabricating.Base on the molecular dynamics theory and integrated with cutting technique,molecular dynamics simulation model of cutting between diamond tool andsingle-crystal silicon workpiece is built in nanometer scale in this paper;software isprogrammed;simulating is run and results are observed;mechanism of materialremoval and surface generation are analyzed. Some conclusions can be obtained:,silicon, the brittle and hard material, is removed from workpiece in ductile-mode innanometer cutting, and the cutting process is also depicted according to crystal latticedeforming;material is more easy to be removed with more sharp tool, volume changeof workpiece, comparing the volume of machined silicon with un machined silicon, isascribed to phase transformation of silicon crystal.Furthermore, some nanofabricating experiments on single crystal siliconspecimen are carried out with SPM. And the mathematic model of the distribution ofthe electric field between the tip and the specimen during the fabricating process isestablished. The mechanism of generating nanometer scale structure is proposed ascomplex electro-chemical reaction in the electric field, and some influencing factorsare explained.Measuring for micro-topography of finished surface with SPM is operated at last,and quality of finished surface is evaluated in all phases. Advantage of this techniqueis testified in measuring field.