| Piezoelectric sensors and actuators with many advantages including simple structure, fast response, high frequency, and simple driving and measuring circuit, have been extensively applied to ultrasonic devices, precision positioning, detecting of acoustics and mechanic parameters, etc. Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar. The main task for this thesis is to measure the longitudinal piezoelectric coefficient d33 and ferroelectric hysteresis of the PZT thin film developed by our research group.In this dissertation, the development of piezoelectric micro force sensors and piezoelectric material is introduced briefly, the base theory of piezoelectric and the measurement of d33 and ferroelectric hysteresis are introduced particularly .The paper covers the following two aspects:1 , We found the d33 measurement system based on AFM (atom force microscope) by the theory of reverse piezoelectric effect. We know the longitudinal deformation is linear with the power on thin film form the measurement system demarcated by normative quartz film. Through the contrast with tradition static d33 measuring experimentation, we can draw the conclusion that the d33 measurement system based in AFM is efficient.2, The ferroelectric hysteresis loops measurement system is realized with the technology of virtual instrumentation . According to the defect of LabView in complex numerical analysis and processing, the mixed program between LabView and Matlab is designed in the system. And the excellent soft compensation arithmetic for hysteresis loop is programmed by Matlab.The results show that this system is very efficient and the software compensation to the hysteresis loops is very nicety and speediness.The longitudinal piezoelectric coefficient and hystersis loop parameter are gained precisionly in this paper, which is contribute to research group develpoping. |
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