Fabrication Of Silicon Inverse Opal Three-Dimensional Photonic Crystal Using Lpcvd/Template Techniques

Photonic crystals is a new study field which is strongly attended in the recent tens'years. Using photonic band gap crystals the photon can be controlled and manipulated effectively. But how to fabricate three dimensional photonic crystals which has good capability and exists band gaps in near infrared and visible wavelength and how to prepare photonic crystals device is still a challenging work. This thesis was based on unexpensive chemic fabrication. The silica opal was fabricated by convection self-assembly methods and the silica opal was filled with silicon by low pressure chemical vapour deposition (LPCVD). Finally silicon inverse opal was fabricated. Firstly the theoretical calculation was carried out for three dimensional photonic crystals. Secondly, the technics process and effect factor in opal and inverse opal fabrication were studied systematically. In the end, silicon inverse opal with a band gap in near infrared communication wavelength was fabricated. The silicon inverse opal array was fabricated in local single cuboid groove lying in silicon underlay. Consequently the three dimensional photonic crystals was cut out, which was a useful exploration for photonic crystals device.The photonic band gaps of SiO₂ opal, Si-SiO₂ composite and Si inverse opal were calculated, further the Si-SiO₂ composite and Si inverse opal were endured with filling model and core-shell model. The calculation result indicates: along (111) direction, the band gap of SiO₂ opal lies in band2-band3, which is a partial gap, and moves to the shorter wavelength with the increase of the incidence angle. The Si-SiO₂ composite and Si inverse opal have three photonic band gaps lying in band2-band3, band5-band6,band8-band9. The gap width between band5-band6 is relatively narrow. The gap width between band8-band9 comes into being the complete photonic band gap.The Si-SiO₂ composite had not the complete photonic band gap, whereas Si inverse opal had a complete photonic band gap lying in band8-band9For the convection self-assembly opal we carry out the following work:Firstly, by studying the technics of convection self-assembly opal, SiO₂ opal with ordered multilayer and large area was prepared. The middle wavelengh of photonic band gap of SiO₂ opal lied in 1780nm, which fits well with the theoretical calculation result. A simple model of convection self-assembly opal was put forward, which was well with the experiment conclusion. It was put forward by the mold that the convection self-assembly includes two successive phase: the building of crystal lattice foreland and crystal lattice growth.Secondly, local single cuboid groove SiO₂ opal array was prepared by convection self-assembly method.