The Experimental Research On The STM-Based Nano-Fabrication In Electric Field In The State Of Atmosphere

The research of fabrication modifying and on the surface of the material in the scale of nanometer has been one of the best concerned topic in the field of Nanotechnology, especially for the relative researches that utilize scanning tunnel microscope (STM). STM can be used not only to observe the atom and the structure on the surface of substance so as to analyze the its physical and chemical characteristics, but also to every kind of treatments in the scale of nanometer to the surface of the material, even operating the single atom.This specific application will be an important way of machining component in the future, which will bring human fabrication into a times that scales with nanometer or atom radius from nowadays micrometer.There has been developing many ways of fabrication since STM first appeared, most of which are based on the electrical effect between the probe and the sample, taking the chemical vapor deposition (CVD) and anticorrosive additive exposure and localized oxidation as example.STM-based nano-fabrication is a new technology and need to be improved in both theory and experiment. This paper systematically studies the STM-based nano-fabrication in electrical field in the condition of atmosphere, as following:Firstly, the theory of STM-based nano-fabrication in electrical field is analyzed and simulated, the distribution of the electrical field between the probe and the sample is studied, and the effect that the curvature of the pinpoint and tunnel current have on the intensity of electrical field is discussed, providing the theoretical basis for the experiment of STM-based nano-fabrication.Secondly, the system of STM-based nano-fabrication is constructed, and its related manipulative system is programmed in VB environment, improving the operability and controllability of the process of fabrication. Besides, the manufacture of the probe is studied, an apparatus to corrode the wolfram filament and a quick response control device are developed, and a microprobe for the STM-based nano-fabrication is made.Finally, through the electrical field experiment on the surface of metal film and single crystal silicon, the influence of the factors, such as the pulse number...