Study Of Nanocrystal Films With Helium And Inner-shell Ionization Cross-sections Using Backscattering Spectrometry

Rutherford backscattering spectrometry(RBS) is one of powerful and widely used ion beam analysis techniques for the quantitative analysis of composition and thickness of thin films and depth profiling of near-surface layers of solids. It is simple, reliable, rapid and nondestructive and is widely used in many research fields, such as thin film physics, material science and environment science. In this paper, using backscattering spectrometry anlysis, we studied on the nanocrystal films with helium introduced by magnetron sputtering method in a He/Ar complex atmosphere and the thickness of thin film samples in measurement of inner-shell ionization cross-sections of atoms by electron impact.In nuclear technology, helium is often produced in fission and fusion reactors and will accumulate to be small bubbles with high pressure inside, which can cause deterioration of the material properties. For the study of the effects of helium, helium must be introduced into metal by an ideal method which will not bring lattice damage. In this paper, high concentration helium was introduced into nanocrystal titanium or LaNiAl films by magnetron sputtering method in a He/Ar complex atmosphere. Concentration and depth profile of the introduced helium were analyzed by enhanced proton backscattering spectrometry. The result demonstrated that the distribution of helium in films is homogeneous and the amount of introduced helium...