Study On The Electrical Conductivity Of Nano-Cu Film Fabric By Magnetron Sputtering

Magnetron sputtering has the advantages of controllable film thickness,high purity,low temperature and high speed,good adhesion,easy operation,stable device performance and environmental friendliness.Therefore,magnetron sputtering is adopted in the development of various functional textiles.The technology of magnetron sputtering to prepare nano-films on textile surfaces is attaching more and more attention.In this paper,the nano-Cu film was sputter deposited on the surface of polyester non-woven fabric by magnetron sputtering.The conductivity of nano-Cu film fabric was studied.The ITO and ZnO films were deposited on the upper and lower surfaces of Cu film by composite coating.The ZnO/Cu/ITO sandwich composite film structure was formed to prevent oxygen from contacting the Cu film,which provides new ideas and solutions for improving the performance of the conductive film fabric.Firstly,the sputtering process conditions(sputtering pressure,sputtering power,sputtering time)of conductive nano Cu film fabric were optimized.The results show that when the sputtering pressure was 0.2Pa and the sputtering power was 120W,the sputtering time was 40 min,the Cu film had the best conductivity.At the same time,the relationship between the crystal state,film thickness,sputtering velocity and conductivity of the sputtered Cu film was studied and analyzed.The conductivity of Cu film was found in most cases.It had a positive correlation with the crystal strength and film thickness,that is,the better the crystallization of Cu film,the better the conductivity;when the thickness of Cu film was increased,the conductivity was also improved.Then,the oxidation rule of Cu film deposited under various sputtering conditions was discussed by studying the change of conductivity of Cu film sputtered in air exposed with time.The results show that when the sputtering pressure was 0.2Pa,the sputtering power was 120W,and the sputtering time was 40min,the oxidation rate of Cu film was the slowest,which was the same as the change of conductivity,that is,the better conductivity of Cu film,the oxidation rate slowest.In addition,a ZnO film was sputtered on the surface of the fabric,then a Cu film was sputtered,and then an ITO film was sputtered to form a ZnO/Cu/ITO sandwich composite film structure by using a composite coating method.The oxidation resistance and conductivity of Cu/ITO composite film and ZnO/Cu/ITO composite film were optimized.The results show that for the Cu/ITO composite film,when the sputtering pressure of ITO film was 0.3 Pa,the sputtering power was 80 W and the sputtering time was 30 min,the Cu/ITO composite film had the best conductivity;For the ZnO/Cu/ITO composite film,when the sputtering pressure of ZnO film was 1 Pa,the sputtering power was 90 W and the sputtering time was 30 min,the ZnO/Cu/ITO composite film had the best conductivity.Finally,under the same environmental conditions,the prepared Cu film and ZnO/Cu/ITO composite film were placed in the air for 120 days.The surface morphology,surface element content,crystallized status and electrical conductivity of two films were tested.The results show that there were fine cracks on the surface of Cu film after 120 days of storage,and the formation of agglomerates,the uniformity and continuity of film surface were destroyed,and the oxygen content of film surface increased from 0%to 12.95%.The sheet resistance rised from 12.6 ?/? to 198.7 ?/?,rises by 186.1 ?/?,the conductivity was significantly reduced,and the diffraction peak intensity of the surface of film was significantly reduced.The surface morphology of ZnO/Cu/ITO composite film was basically unchanged,maintaining its original uniformity and continuity,the oxygen content of film surface increased from 5.38%to 6.04%,only increased by 0.66%.The sheet resistance increased from 11.8 ?/? to 17.8?/?,only increased by 6 Q/o,and the conductivity remained basically unchanged.The diffraction peak intensity of the surface of Cu film in the ZnO/Cu/ITO composite film was basically unchanged,and the crystallized status was still good,which indicates that the ZnO/Cu/ITO composite film had good oxidation resistance and the conductive fabric prepared by this method had good electrical stability properties.