Study On Preparation And Electrical Properties Of Vanadium Oxide Thin Films

Vanadium as a transition element can compose varial Vanadium oxides by V_xO_y with oxygen and Vanadium oxides have been widely studied because of their excellent characters. But Vanadium has so many valence that Vanadium Oxides with strict metric are not available. In this paper, good crystal thermal-sensitive Vanadium oxides (V₂O₅, VO₂(B), VO₂(A), V₂O₃) thin films are prepared from V₂O₅ powder by vacuum evaporation and vacuum annealing. We selected the best qualifications by experimenting with various fabricative parameters such as underlay material and temeprature, thin film thickness, vacuum degree, evaporation current, evaporation time, anealing hour, anealing temperature. The structural properties, surface morphology, electrical properties, and V ion valence state of VOx thin films were measured by tesing and analysed and some instructive results were got. The contents of the work are listed as following:1. The effects on the crystal structure and the temperature coefficient of Vanadium oxide thin films were studied because of different underlay temperatures and materials. Rusults were found underlay temperature did not influence obviously the crystals' sizes of the thin films, but Vanadium oxide thin films on single-crystal underlay had better crystal structure and temperature coefficient of...