Two Methods For Fabricating Inorganic And Organic Patterned Surface

Fabrication of patterned surface in micrometer and nanometer scale hasimportant scientific significance and application value in micro-elctronics science,optics science, biology, chemistry, materials science, etc. With the development ofscience and technology, new materials continually come forth. However, pure bodyor film materials can not satisfy people's demand for high functional materials. Torealize more functions and capabilities, technologies for surface patterning ofinorganic and organic materials have become a very active research field in modernphysics, chemistry, materials science, etc, in which the patterning of magneticmaterials and polymer materials attracts much more attention from people. Theexistence of flux closure state in magnetic rings minimizes both the magnetic fieldand magnetic energy outside of the rings;simulation and experimental observationindicate that there is a new state ("onion state") in the magnetic ring. That state isvery stable and exchanges fast, which can improve the magnetic storage density.Therefore the special structure of magnetic rings has potential application inhigh-density storage devices. Organic polymers are potential perfect building blocksto fabricate structures in micrometer and nanometer scale because of theircharacteristic scale, definite makeup, facility to process and broad choices forchemical functions. Many kinds of polymers with different characters are used tomodify surfaces in order to get functional patterned structures.In Chapter 2, we fabricated ordered 2D arrays of magnetic rings on goldsubstrates modified by patterned SAMs via a combination of μCP, surface-inducedcondensation, surface-directed and solution concentration-controlled dewetting andthermal decomposition. This method is facile to operate. By simply controlling someexperimental conditions, magnetic rings with different dimensions can be fabricatedfrom patterned SAMs with the same dimension. Through the MFM characterization,we verified the magnetic properties of those ordered rings. In the experimentalprocess, the thermal decomposition temperature of Iron (Ⅲ) acetylacetonate is 300oCand the reaction time is one hour, which is a very simple method with lowertemperature and less time. This method can also be extended to fabricate rings ofother magnetic materials on other substrates, which significantly broadens itsapplication. These ordered magnetic rings supply an excellent structure to researchthe application of magnetic materials in high-density magnetic storage.In Chapter 3, we developed a method that used a combination of oxygen plasmaetching, photolithography, and surface-initiated atom transfer radical polymerization(ATRP) to fabricate large-area binary polymer pattern grafting onto the surfacethrough covalent bounds. First we got the homogeneous polymer film on the singlecrystalline silicon surface through ATRP. Then with the help of photolithography, weobtained ordered pattern of photoresist. The photoresist pattern was used as atemplate in oxygen plasma etching process, which produced inorganic hydroxylgroups on the bare regions of the silicon surface. After etching, the photoreist patternwas removed and a second ATRP process was utilized to graft another polymer onthe sites of inorganic hydroxyl groups. Many monomers can be polymerized throughATRP;the reaction conditions are mild and easy to control;the reaction isn't subjectto water or impurities. All those factors enable our method to be utilized to getordered pattern of many different kinds of polymers. Also we can change the patternmorphology by easily tuning the template for photolithography. Furthermore, thephotoresist pattern can be conveniently washed out, so we can fabricate photoresistpatterns and form ternary or multiple polymer patterns repeatedly. It opens a newway to fabricate multiple polymer patterns.