The Research And Application On Micro WEDM Technology Basing On The AGIE CHALLENGE ECUT 2F Machine Tool

In this paper, the basic concept and the characteristics of MEMS ( Micro–electro -mechanical System ) are presented. MEMS technology is a hot spot of science and industry in the 21st century, and micro-machining technologies are the key problems of MEMS development. Meanwhile, the actuality of micro-machining technology both domestic and abroad is presented in this paper, especially the micro-LS-WEDM technology.The paper discusses the key techniques of Micro LS-WEDM to meet the needs of high precision and surface integrity, such as the pulse generator with micro energy and precise control of energy discharging, the gap characteristic of fluid, etc. And the main technical aspects that influences the machining performance mostly. Basing on the AGIECUT CHALLENGE ECUT 2F machine tool and the Esprit software, we laid a strong emphasis on the application of WEDM technology on some classical and intricate micro-parts, and we finally successfully fabricated the finest and smallest standard-involute-microgear and several micro intricate parts which are practically used in the Telecommunication Industry ultimately. Also the possibility and prosperity of the combined technology of LS-WEDM and EDM for machining MEMS instruments are emphasized and attempted successfully, we finally made several micro mechanical structure like a micro-flowmeter by the combination of the up two technologies, in which the micro-gear (m=0.1mm) and the electrode of the micro-gap are fabricated by the LS-WEDM technology.At the end of this paper, the later studies on the Micro LS-WEDM technology and the combination of different micro untraditional machining technologies are suggested.