| In this article, the basic concept and the characteristic of MEMS(Micro-electro-mechanical System)are presented. MEMS technology is a hot spot of science and industry in the 21st century, and micro-machining technologies are the key problems of MEMS development. Meanwhile, the actuality of micro-Ultrasonic machining and micro-Electrochemical machining in China and overseas are presented in this paper. Also the possibility and prosperity of the combined technology of USM(ultrasonic machining) and ECM(electrochemical machining) for machining MEMS instruments is emphasized. The basic conditions of the combined technology of USM and ECM is studied too. In this paper, the experiment system of the combined technology is built. In the experiment, vibration rod and the tools of different section shapes are designed and manufactured, such as round, square, triangle. With these tools, the single USM , ECM and the ultrasonic electrochemical combined machining experiments on different materials (glass, piezoelectricity chinaware, horniness alloy)are carried out. During the period of experiment, the influence of electrolyte parameter(ingredient, concentration, temperature), electrical parameter(voltage, pulse parameter), swing, frequency, pressure and abradant granularity on the process' stability, quality and efficiency is analyzed. By means of the harmonization of ultrasonic and electrochemical machining, many holes with different section shapes are manufactured successfully. By comparison of the machining results, higher cutting speed, machining precision and surface quality when machining the hard and brittle metal by the way of the ultrasonic electrochemical combined machining are gained. Thus the possibility and advantage of the combined technology of ultrasonic and electrochemical machining has been proved. At the end of this paper, the later studies on the combined technology of USM and ECM are suggested.
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