The Preparation And Properties Of Unsupported Al Films And Au/Gd Multilayer Films

In the inertial control fusion ( ICF) physics experiment, the Al film and metal multilayer films are in common use types of target. The good fabrication property of Al film is required. The Al film has much extensive usage, but how to prepare the Al film with the small surface roughness and inner stress is the researcher's goal. In recent years, along with the progress of the soft X-ray multilayer films research, multilayer films are applied more and more extensive in the ICF physics experiment, especially Au/ Gd multilayer films which have the higher X-ray transforming rate than Au film, have been applied widely in ICF physics experiments.In this article, we prepared supportless Al films on different disjointedness, and investigated how to prepare the Au/ Gd multilayer films with sharp interface by DC magnetron sputtering.We deposited the supportless Al-films by vacuum evaporation, and analyzed the condition of stress on different disjointedness with X-ray diffraction (XRD) and the roughness with atom force microscope (AFM). The investigation indicated that the inner stress and the roughness were different on different disjointedness.The results show that: (1) The disjointedness has great influence on the stress. In sameness technical conditions, the inner stress of films on Sodium Vinylsulfonate Polymerization and on Polyvinyl Alcohol are lower than it on glass. (2) In sameness technical conditions, the surface roughness of film on Polyvinyl Alcohol is better than on Sodium Vinylsulfonate Polymerization, but the stress of film on Sodium Vinylsulfonate Polymerization is lower than it on Polyvinyl Alcohol.We deposited the Au/ Gd multilayer films by DC magnetron sputtering, and analyzed the structure of films and the influence of the preparation condition.The results show that: (1) The interface and the surface roughness with different period thickness are different. With the increasing of thickness, the interface became acuity, but the surface roughness became coarseness. (2) The sputtering pressure and the sputtering efficiency have important effect to the interface and the crystal structure. With the increasing of them, the interface became acuity, the deposition speed and the crystal thickness increased. (3) Because the crystal lattice didn't match, there are many defects in Au/ Gd multilayer, the Au and Gd crystalline grain did not grow up completely in the process, the electric resistance goes up with the temperature. When...