| With the development of scientific technology and domestic economy, demand for materials properties, especially surface properties is higher and higher in many industries. The surface modification technologies of materials are developed continuously. Among them, preparation technologies of surface coatings/films developed quickly from plating, chemical plating, surface diffusion, surface alloying to PVD and CVD film techniques, coating techniques, ion implantation techniques. And also two or more technologies can be combined to prepare all kinds of surface coatings/films which have strong bonding to substrates and are green or without pollution and superior properties.Titanium is an important metallic material and has merits of high strength, good corrosion resistance and low density. As a new constructive material of good properties it is being applied widely. But application of Ti and its alloys in engineering is restricted because of high friction coefficient and poor wear resistance. Therefore, to raise the wear resistance of Ti and its alloys has become the"hot-point"of domestic and international material researchers.Titanium nitride has beautiful golden color. Its melting point is up to 2950℃and Vickers-hardness is about 20GPa. Also it has low friction coefficient, chemical stability and superior corrosion resistance. It can be prepared on the surface of tools, dies and cutting tools to improve their wear resistance and properties of components of aircraft, rockets and other aviation and spaceflight devices.There are lots of methods to prepare the TiN surface layers/films which are divided into the physical and chemistry methods. The physical methods, such as PVD have the advantages of simple technology, saving materials, free from...
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