Study And Apply Of New Technology For Wastewater Treatment And Middle Water Reuse In Semiconductor Manufacturer Field

With the development of semiconductor in mainland, increased foundry was invested in the east of China. A lot of water is consumed for wafer manufacture. Many chemicals and special gases are also supplied to Fab. The wastewater's component is very complex. Choice wastewater treatment process, controls the discharge spec, reuses middle water and save running cost is essential.The chromium-containing wastewater is the most toxic. Deoxidize in acid environment is existing treatment process. The effect of pH value on deoxidization of Cr6+ when treating chromium-containing wastewater from Fab was investigated, and the electric potential of the radox reaction which deoxidize Cr6+ into Cr3+ which pH value of 7 and 2 are calculated using Nernst formula respectively. The result showed that the electric potential difference was larger with pH 7 than with pH 2, thus benefited the transfer of Cr from Cr6+to Cr3+, and the above results has been confirmed through the...