Study Of CrSiN Film Deposited By Arc Ion Plating

The history of surface coat has been more than one thousand years. TiN was the earliest horniness film, and the second one is CrN film. They were widely used in the fields of engine. With the development of automatic machining and rigorous working conditions, CrN and TiN films have some localizations, in the facts of hardness, wear-resisting properties and so on. So TiAlN TiBN CrAlN films aroused people's interests, especially Ti-Si-N nanocomposite coating, which formed nc-TiN/a-Si-N, improved the hardness markedly and it can reach to 80-105GPa. The reseach has choosed the basic of CrN film that has well mechanical performance than TiN film, through appending Si content that looking forward to depositing CrSiN which has nc-CrN/a-Si-N, so it can improve the mechanical perferties of hardness, wear-resisting, and oxidation resistance.Arc Ion Plating was used to deposit CrSiN coating in the reseach and through adding appropriate Cr coating to fall internal stress and realize thick film. The study introduced AIP's working principle and its applied future, analyzed different parameters which influenced the structure, surface shape, microhardness , for instance Si content, bias voltage, temperature and time and so on.The results show that nc-CrN/a-Si-N was formed , and with the increaing of the Si content, CrN crystal was thinned and which increased the hardness too.The instrument detected that a-Si-N prevented the grouth of CrN, so which improved the hardness and the netlike structure stopped crystal lattice occurring aberration, accordingly improving mechanical performance and enhancing hardness greatly.Through changing bias voltage, which enhanced the hardness of CrN and CrSiN .Respectively at -120V and -60V, the hardness achieved crest. The adhesive strength between film and substrate influenced straight the binding force. The substrate' processing technics assured the fastness of adhesion, synchronously the addness of Cr coating provided good guarantee for thick film because it can fall internal stress.