Influence Of Target Current And Bias Voltage On TiN/TiAlN Composite Film By The Multi-arc Techniques

Compared to the TiN film,TiAlN film has wider application fields with higherhardness,wear resistance.high temperature oxidation resistance and so on. Theexisting researches have reported that the structure morphologies and properties offilm are largely influenced by the changes of processing parameters.In this paper, alayer of TiN film was firstly deposited on the M2high speed steel.Then TiAlN filmwas deposited on the TiN film,and the films of TiN and TiAlN were deposited bythree times alternatively.At last,TiN/TiAlN composite film were prepared and theproperties of the film were studied.By changing the target currents and bias voltages,the paper researched theinfluence role of target currents bias voltages within a certain range on the surfacecomposition and morphology,micro-hardness,adhesive force,thermal shockproperty,and the friction and wear performance of film.The results showed that：The film properties were changed by adjusting process parameters.By increasingthe pulse bias voltage amplitude can reduce the surface roughness and improve thesurface gloss of film,making the film become dense.The best film surface morphologyappears when the bias voltage is-300V.By choosing proper Titanium target currentscan make film surface appear to be flat and level,and improve the surface gloss offilm.The proportion of film Al/Ti ingredients decreases gradually with the increase oftarget current and bias voltage.As to the mechanical property,film/matrix adhesive force and micro-hardnessincreases firstly and then decreases with the increase of target current.The highestcomprehensive mechanical properties appear when the Titanium target current is70A.The hardness of the film can achieve to2600HV and the film/matrix adhesiveforce is110N.On the whole,the best film/matrix adhesive force appears when the biasvoltage is-240V.With the increase of matrix bias voltage,the micro-hardness decreases firstly,then increases.The minimum micro-hardness appears when the biasvoltage is-300V.As to the characterization of the friction and wear performance of film,thefriction coefficient decreases firstly and then increases with the increase of Titaniumtarget current.The best wear-resisting property of the deposited TiN/TiAlN filmappears when the Titanium target current is70A.Under the same frictionparameters,the wear-resisting properties of the three different bias voltages depositedfilms of the same series were measured.The best wear-resisting property of theTiN/TiAlN film appears when the bias voltage is-300V.In the experiment of thermal shock test,the thermal shock resistance of the filmunder high bias voltages is less.There is almost no effect of Titanium target current onthe thermal shock resistance property.