Study On The Alumina Thin Flim Fabrication On Steel

Al₂O₃ thin film prepared by magnetron sputtering has many advantages, such as high deposition rate,good film quality,especially low film temperature, thus avoiding effect on the performance of the substrate. Therefor,it is suitable for improving performance of metal surface.The research of Al₂O₃ thin film on steel substrate has been merely reported. This paper is mainly about the research of preparing Al₂O₃ thin film on steel substrate by RF magnetron sputtering.Al₂O₃ as the target,adjusting sputering power ,pressure and time,Al₂O₃ thin film on 40Cr was prepared by RF magnetron sputtering in experiments. The surface morphology, microscopic structure ,component and bond of the film was synthetically analyzed with SEM,X-ray diffraction , FT-IR spectroscopic analysis. The Influence of process parameters, pretreatment method and Ni-P alloy interlayer on the friction coefficient and adherence of the films were studied by friction and wear test and scratching test.The results of experiment indicated that film prepared by RF magnetron sputtering at room temperature was amorphous. The FT-IR spectroscopic analysis proved that there was Al-O bond in the film. The film prepared by RF magnetron sputtering at 250W, 3h,5.0Pa was smooth, densified and had good adherence. The Ni-P alloy interlayer and corrion pretreament could effectively improve adherence between film and substrate. The friction coefficient of Al₂O₃ thin films was about 0.3.The Ni-P alloy interlayer could farther decrease the friction coefficient and reduce the wear damage.