Research On Machining Of High-aspect-ratio Microstructures Based On Excimer Laser

A new method for the machining of high-aspect-ratio micro-structures is presented in this paper. By this method, the micro-structures can be gained without HF and other pollutions, what's more, it is single- layer and low–cost, all of which can't be achieved by traditional methods. In this new method, machining PMMA to be mould of micro-structures by excimer-laser technology, copper-sacrifice layer technology and nickel-sacrifice layer technology have been introduced.The contents of this paper are:(1) Analysis of chemical plating principle and some improvement of the technology on the basis of traditional method. The improvement makes a firmer bond between the plate and the Si, It also simplifies the process of the technology.(2)Take PMMA as micro-mould on the basis of the analysis of some kinds of machining materials.(3)In order to gain perfect machining performance ,the author study the key factors that influence the machining performance, those factors include laser energy, relative frequency and burn areas.(4)The key factors that influence the performance of the electroforming are electrode potential, polarization, electroforming time, pH, organic impurity and the composition of work liquid. Better performance can be achieved by setting parameters of the electroforming according to the analysis of those factors.(5)Take electrochemical method to prevent the corrosion of the structure layer. The advantages, disadvantages and somesuch should be improved will be discussed in the end of this paper.