Research On 3D-Characterization Of Surface Microtopography Based On GPS System

Geometrical Product Specification and verification (GPS) standard system is the most fundamental standard system in the world and the foundation of quality management and automatization integrated system for the manufacturing industry. It is very necessary to conduct the research on the characterization technique of surface topography based on general matrix mode of novel GPS system, such as theoretical study, applied transition and standard development.In this dissertation, the framework and the development trends of novel GPS system are studied, the current characterization and assessment methods of surface microtopography are analyzed, and then it is pointed out that the characterization and assessment of surface microtopgraphy is one of the important parts of the GPS system. The current characterization parameters and standards of 2D microtopgraphy are investigated. The 2D roughness characterization methods such as based on middle line and Motif method are studied, and then their strongpoint and shortpoint are studied.The 3D characterization of surface microtopography is still on road now, the current work and development trends are researched, and the mathmold of Gaussian filter are studied and built. The Areal parameters of ISO/TC213 N756 and 14+3 parameters system used by Europe community are studied, a group of parameters under these two systems above and based on GPS system's principle are selected, the relationship between assessment parameters and surface functions are analyzed. Then a method and principle of select parameters for characterizes the surface mircotopography are discussed.After the analysis of all kinds of measurement for surface topography, the principium of atomic force microscope (AFM) are illustrated, then AFM be used to measure the lapped finishing part so as to got the information of surface topography, then reshaped the surface information and deal with Gaussian filter so as to got the assessment foundation, based on the research above, the Areal parameters are calculated and compared. The result showed that the amplitude parameters and hybrid parameters are sensitive and the function parameters is steady, at the same time it is discovered that the surface of lapped finishing part tend to Gaussian distribute, so that the Gaussian filter is fit for lapped finishing part surface's analysis. The experiment also showed that the AFM is a excellent measure instrument of GPS's study work, it's especially for the high precise surface topography.