The Study On Glass Substrate Carrier Material With High Density Holes Array Integration With Porous Glass

On basis of Li₂O-Al₂O₃-SiO₂ system photosensitive glass-ceramics,the influence of the content of nucleating agent Ag have been studied in this paper,the precondition are that the contents of the glass have been confirmed.Masking irradiation process is used to prepare glass substrate carrier material with high density holes array,the preparation process is also improved,which is provided condition for compounding with porous glass powders.At the same time,silane coupling agent is used for the compound.First let the porous glass powers phase splitting,infilling in the substrate holes,then leaching in sulfuric acid for getting nano-multiaperture structure,so can realized requirement of that one macropore contain incalculable nano-pores.The production had great market potential in medical treatment,biotechnology and gene analysis.The glass substrate carrier with holes array on basis of Li₂O-Al₂O₃-SiO₂ system photosensitive glass-ceramics have been prepared,on which there was a selective solution rate in HF acid aqua after crystallization.The glass substrate first was exposed in ultraviolet radiation under a quartz mask.Next,there was crystallization in the exposure areas of the substrates and lithium metasilicate microcrystal could be gained after heat treatment at appropriate temperature.Finally,the partial crystallization substrate was etched with a given concentration HF acid aqua and holes array was gained as the crystallization areas were dissolved.Na₂O-B₂O₃-SiO₂ system glass was used for preparing nanometer porous glass.It was prepared by phase separation and succedent acid leaching.Pore size could be controlled through adjusting glass composition,thermal treatment and acid leaching system.Porous glass powder integrated with cavity substrate and KH-570 was adopted as bonder.It is possible to gain different form of holes array on the glass substrates on the basis of appropriate component of glass and process parameters resulted from the investigation.The structure of glass substrate sample was charactered using XRD,SEM, FESEM etc.The analysis results of UV-Vis spectroscopic,DSC/TG were also utilized to discuss how the factors effect on the properties of glass substrates.Average pore size and pore size distribution was charactered using FESEM mainly.It provided routes to prepare pore size controllable porous glass with interconnected pore and narrow pore size distribution.It could conclude from the results of experiment and analysis that:1.Appropriate nucleating agent content is important for preparation glass substrate carrier,2.1g(900g)AgNO3,mass percent 0.3%(wt%)is the optimum percentage.2.The best condition is heat treated in 580℃for 1.0h,crystalline in 610℃for 1.0h, etched with a concentration of 5 vol.%HF acid aqua.3.KH570 is used for the integration,concentration is 16.7%(1:5 wt),PH=4.0, stirring 30min.4.The glass cavity sbustrate withφ1.0mm was integrated with porous glass powder KH570 was adopted as bonder.A 9×9 matrix biology sample carrier device can be prepared,the nano-pore size is about 70nm.