Studies On The Structure And Properties Of SmCo Series Single And Multilayer Magnetic Thin Films

In this thesis,SmCo series single and multilayer magnetic thin films are fabricated by using RF-magnetron sputtering system.With the results of EDS,XRD,VSM and STM, we can get the following conclusions:(1)The effect of sputtering parameters on magnetic properties of SmCo thin films is obvious.Through optimizing the sputtering parameters,the optimal sputtering parameters are obtained.It is found that when the sputtering power,sputtering pressure and sputtering time of the SmCo thin films and the underlayer are 60W,0.5Pa and 8min, 125W,0.5Pa and 4min,respectively,the in plane coercivity is as high as 2.79×10~5A/m.(2)The underlayer can effect the magnetic properties of SmCo thin films.The VSM measurements reveales that SmCo thin films will possess better magnetic properties with Cu as underlayer than Ti and Cr.Compared with Cr and Ti as underlayer,the coercivity of SmCo thin films with Cu underlayer is higher 56%and 40%,respectively.The magnetization orientation of the films changes from in-plane to perpendicular when the temperature of Cu underlayer is 150℃.The SmCo/Cu thin films with the coercivity up to 4.86×10~5A/m are prepared.The STM images reveales that SmCo/Cu thin films will possess better magnetic properties with Cu underlayer at 150℃.(3)Cr interlayer affects the magnetic exchange coupling of SmCo/Cr/TbFeCo multilayer thin films.It is found that the magnetic properties of multilayers vary with the thickness of Cr interlayer,especially the values of saturation magnetization Ms and the coercivity Hc fluctuate periodically with the thickness of Cr interlayer.The STM images reveales that grain size of SmCo thin film with inserting Cr interlayer is much smaller than pure SmCo thin film.And the variation of coercivity Hc is attributed to the microstructure change of SmCo layer influenced by Cr interlayer,the variation of Ms is related to interlayer exchange coupling.