Research On Pulsed Power Supply Preparing SmCo₅ Magnetic Thin Film

SmCo₅ is one of the first generation of hard magnetic material, which not only has a higher energy product and a larger coercive force, but also in the hard magnetic rare-earth series exhibit good temperature characteristics. In addition, SmCo₅ also has a high uniaxial magnetic anisotropy energy, so it can be used as a new excellent type of magnetic recording materials.In this paper, magnetron sputtering power is a new AE?Advanced Energy? DC pulse power supply, and the use of high vacuum magnetron sputtering apparatus.Preparing of different structures of Cu?buffer layer? /SmCo₅?magnetic layer? /Cr?protective layer? and Cr?buffer layer? /SmCo₅?magnetic layer? /Cr?protective layer?on a Si wafer. Samples were prepared in the emergence of 1:5 and 2:7 SmCo phases. We have carefully studied the magnetic properties and structural characteristics of the sample, specific studies are as follows:?1?In preparation of SmCo₅ hard magnetic film, we use magnetron sputtering apparatus and using common sputtering manner. When Sm target sputtering power is30 W, and Co target sputtering power is 115 W, the sample tested by spectroscopy experiments and found that Sm and Co atomic ratio close to 1:5.?2? When Cr as a buffer layer, under the same circumstances annealing, we studied the effect of different thicknesses Cr buffer layer on the magnetic properties and structure of a sample. Found that with increasing Cr buffer layer, the crystallinity of SmCo₅ changed for the better, and the coercive force becomes larger. In addition, we also studied the effect of different SmCo₅ thickness on the sample of structure and appearance, found that with increasing thickness of SmCo₅, SmCo₅? 0211? diffraction peak becomes more obvious and strong, Cr?110? diffraction peak has diminished. All this shows that the increase of the magnetic thin film layer not only have an impact on SmCo₅ own structure, but will affect the structure of Cr buffer layer.?3?When Cu as a buffer layer, under the different circumstances annealing, we studied the effect of different thicknesses Cu buffer layer on the magnetic properties and structure of a sample. It found appropriate to extend the annealing time and increasing the thickness of the Cu buffer layer may increase the crystallinity of the quality of the sample.