| The scientific research of silicon single crystal material is prone to high purity, high integrity and uniformity, big diameter with the fast development of IC and PV industrials. High quality large diameter silicon crystal can be obtained by applying transverse magnetic field on the melt silicon to suppress the melt convections.In this paper, the model of transverse magnetic field in the six-inch single crystal furnace is built and analyzed by finite element method, based on which the design parameters are optimized.First the melt convections and the cause of impurity nonuniformity during the growth process are analyzed, the principle of magnetic field suppress melt convections is introduced; then the structure, characteristics and working principle are explained; then the model is built with the software ANSYS, the model proved to be correct and can be used for the design and optimization of transverse magnetic field after simulation and analysis; at last the design diameters and actualize plan are obtained, include magnetic intensity, distribution and uniformity, coil turns, radius of iron, width and height of magnetic pole and section area of wire etc, the power consumption is also optimized to be little by analyzing the relation between coil turns , section area of wire, current, current density and power through simulation, which provides a convenient and reliable simulation method and conclusions with significant reference value for the design of transverse magnetic field in single crystal furnace. |
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