Simulation Of CZ And Optimizaton Of Cusp Magnetic Field Character

With the development of large-diameter single crystal silicon and there are more polysilicon in the crucible, melt convection becomes a seriously problem in CZ.It is based on the six-inch mono-crystal furnace (sixteen-inch crucible) through mathematical modeling simulation to research the melt convection and the cause of impurity nonuniformity during the growth process. Then based on the influcence of mass transport on quality of single crystal to study crucible temperature field distribution with the software ANSYS.In the design procession,cusp magnetic field that include coils and well of magnetizer are simulated,optimized and analyed,and two design schemes that can be applied are provided.It is provided a new reliable way and practical datas for the designing of six-inch mono-crystal furnace cusp magnetic field...