| A high-speed and high-precision air-supported positioning table for IC packaging is presented in this dissertation. The static characteristic and the design method of the positioning table which supported by aerostatic guide using orifice restriction are studied intensively. The contents and outcomes of the study in the dissertation can be summarized as follows:On the basis of the kinetics and continuous equations of the fluid mechanics, the law is studied about the static characteristics of the aerostatic guide using orifice restriction. The influence of the orifice and the thickness of the air film on the carrying capacity, rigidity and air consumption has been analyzed. The structure design method of the aerostatic guide is presented.A group of optimized parameters about the aerostatic guide is presented, and the static characteristics of the positioning table are verified.A high-speed and high-precision air-supported positioning table which is driven by voice coil actuators, supported and decoupled by aerostatic guide is presented. It applies voice coil actuators to replace the formal servo motors. This eliminates the backlash and friction between the lead screw and nut. It applies the aerostatic guide to eliminate friction. The two voice coil actuators are mounted on the base by using the air-supported decouple structure, so the inertia of the table can be reduced. These meanings make the precision positioning table enhance the performance possible.The structure design and the blueprint of the high-speed and high-precision air-supported positioning table have been completed.The achievements stated in this dissertation enrich the theory of the design and manufacture of the high-speed and high-precision air-supported positioning table. The study has important engineering significance and theoretical significance, and it builds solid foundation for the manufacture and advanced research about the high-speed and high-precision air-supported positioning table.
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