The Design And Experimental Research Of Nano-Positioning Table

In order to develop a nanometer level micropositioning workpiece table for surface grinding, this dissertation deals with the key issues relevant to mechanical design, dynamic modeling and control algorithm by means of dynamic design theory , finite element method and mechanical dynamics.Theory calculate and finite element method to symmetric conic-section flexure hinges is used to compare and analyze their dynamics characteristic.Based on dynamic design theory, a micropositioning workpiece table with pose adjustment ability has been developed. The parallel direct driving mechanism improves the static and dynamic stiffness in the feed direction.The finite element method is used to analyze the characteristics of the micropositioning workpiece table. The performance of the micropositioning workpiece table subjected to different load and disturbance has been examined and the modal shapes and natural frequency of the micropositioning workpiece table have also been obtained.Utilizing the Euler angle and RPY angles to describe the pose of the moving part, the direct and inverse kinetic models have been developed respectively.