Study On Preparation And Characterization Of Patterned Porous Silicon And Its Explosive Performance

Patterned porous silicon (PPS) is porous silicon with certain form and size pattern. Porous silicon (PS) was formed on the silicon chip. It have a spongy-like structure the with nanometer silicon atom as skeleton. PPS not only possess all the great properties of porous silicon, and also have some regional figures, controllable characteristic of size at the same time, which made it used widely in fields such as mere electronic device, battery, biosensor, etc. At the same time, explode property of porous silicon was recognition by experts from countries all over the world because of its high explosion energy, little environmental hazard and compatibility with silicon base production technology. But the study on its performance of explosion is not very ripe. This thesis combines and studies the current situation both at home and abroad, has carried the research about preparation and characterization of PPS and study of its exploding performance. The main points of this dissertation are as following:①The influence of anodization condition( such as anodized time, current density, HF concentration of electrolyte and the type of silicon subatrate) on PS structure parameter was studied. The optimal anodization condition to prepare the PPS was: n Si, illumination, HF concentration 30%, current density 35-45 mA/cm2, oxidized time 15min②Through pre-lithography different forms and different wide pattern on the silicon substrate, effect of shape and dimension of pattern on PPS morphology was studied.③Microstructure, formation and photoluminescent property of PPS were characterized by SEM, FT-IR and PL spectrum. PPS has a thick of 62~83μm. A large amount of crackle and silicon pole is observed in the microstructure of PPS with Si-Hx bonds on its surface, and its emission peak is at 650nm.④Explosion performance of composite system composed by patterned porous silicon and gadolinium nitric acid was carried out. Results show that patterned porous silicon can better realized spreading explosion. The pore thickness, porosity and the total volume of silicon pore impact on PS explosion performance was also be researched.⑤Porous silicon preserved in air, in ethnol and oxidized by UV light was carried out, and the preserving time last 50 days. PL intensity and explosive performance of porous silicon preserved by different method was researched. At the same time, chemical bond on the surface of PS preserving in air, in ethanol, and oxidized by UV light was studied by FT-IR spectrum.⑥Based on SEM photography and chemical bond analysis of PPS before and after explosion, explosion mechanism of porous silicon combined with oxidant was explored.