| In this paper, DLC thin film are deposited on the surface of the pump poston crankshaft (steel 5CrMnMo) use the radio frequency plasma enhancement chemistry vapour deposition (rf-PECVD),under different methane,hydrogen, argon current capacity and different transitional layer condition. Based on this , XRD,LSCM,SEM,EDS,scratch tester and instrumented-indentation testing were used to observe and analyze the microstructure,element distributing,the bonding force between coatings and substrate,indentation hardness of the coatings systematically.The results show that the DLC film can be deposited on metals by RF plasma.Due to the innerstress between films and substrates,the adhesion of DLC film on substrates has a problem. Film are cracked and peeled off easily from the substrates. Besides that the films are not wearable. To solve the problem Ti/TiC and Ti/TiN gradient layers are prepared by rotary magnetron are ion beam deposition technique before DLC film deposition.The results indicate that adhesion,hardness and the wearability of DLC film are significantly increased.
|
PDF Full Text Request