Design And Development On The Piezoelectric Actuated Micro-Positioning Stage

Precision positioning is the key technology of precision manufacturing and precision measurement. Micro-positioning stage is among the objects used in the precision positioning technology.To target the micro-positioning stage actuated by PZT,this dissertation systematically analyzes the key technology that plays an important role in the stage.A two-degree micro-positioning measurement stage,which is formed of composite parallel flexure hinge,has been designed by using Finite Element Analysis.This paper does research on the dynamic characteristics of the stage and sets up its mathematic model.On the basis of this,by employing the MATLAB/Simulink software the model is simulated and the parameter of PID control is tuned.Finally,the open-loop and close-loop testing system of micro-positioning stage is built based on the LabVIEW developing tool.This paper was supported by the Natural Science Foundation of Zhejiang Province(No.502021) and the National Natural Science Foundation(No.50805042).The main research and chapter arrangement of this paper were as follows.Chapter one:The background and significant of the research was introduced firstly.Then,the current research situations of the piezoelectric actuated micro-positioning stage were expatiated.At last,combining with the researching projects,the main content and frame of this paper was presented.Chapter two:The main parts of the piezoelectric actuated flexure micro-positioning stage were given out firstly.After the Excellence side and Disadvantage side of the main parts of the system was compared,the system solutions was given out.Chapter three:Based on theoretical research of the actuation mechanism,the hysteresis nonlinearity of the piezo-ceramic was discussed,and the characteristic of the actuators was tested.Chapter four:After the general situation of compliant mechanism composed by flexure hinge was introduced,the concept of Compliant Translational Joints was drawed into the paper.Three kinds of Compliant Translational Joints was discussed.At last,the two dimension flexure hinge micro-positioning stage was designed by using the principal of proposed compound parallel four bar mechanism.Chapter five:The mathematic model of the system was set up.Then by employing the MATLAB software the PID control was simulated.With the LabVIEW tool the PID close-loop control system was developed and tested.Chapter six:All the work in this dissertation was summed up,and the future research works were prospected.