Design Of Micro-positioning Platform Driven By PZT For Precision Machining

With the development of new technology, it has put forward higher requirementsfor manufacturing technology. Precision and ultra precision machining technology hasbeen paid more and more attention, micro-positioning system with high performance isthe key to realize precision and ultra precision machining.From The Education Department of Henan Province Natural Science ResearchProject<<Study on the development of small precision lathe>>, a micro-feed systemwith piezoelectric element is presented for precision grinding machine to meet therequirement of the industry. The compact design features the use of solid flexures totransmit motion from a piezo stack actuator. A close-loop control system isimplemented which uses single chip as the central processor. High precisionpositioning over a large workspace is a fundamental feature of a precision machine.(1)Designed the whole micro-feed platform based on PZT;(2)Two kinds of micro displacement magnification mechanism were designed andtested. With finite element modeling and static analysis on the amplificationmechanism, the amplifier amplification in different voltage drive, mechanicalproperties and the corresponding stiffness are given;(3)A close-loop control system is implemented which uses single chip as thecentral processor, in order to solve the effect of micro-feed platform which caused byhysteresis and creep error of PZTs and the disturbance of the environment;(4)Combined with the requirements of small precision lathe, the static anddynamic characteristics of the micro-positioning platform are also studied byexperimental method, and analyzed the results.The experimental results show that the micro-feed platform can meet the highprecision, high rigidity requirements, resolution of18nm and0.4mpositioningprecision were achieved in the micro-feed system.