Norbornene-Based High Transparency Polymer Applied To 193nm Lithography: Synthesis And Properties

Norbornene and maleic anhydride copolymer, norbornene, maleic anhydride and methyl acrylate terpolymer were synthesized by oxygenated thermal polymerization and visible light induced photocopolymerization, and their structure were characterizated with IR, 1H NMR and GPC. The initiation system, the solubility, the thermal properties were also investigated and the results were summarized as follows:1. Norbornene and maleic anhydride terpolymers showed better solubility in common organic solvents than Norbornene and maleic anhydride, which can be dissolve in THF, acetone, dioxane,and CHCl3.2. In the oxygenated thermal polymerization, the low content of oxygen promoted norbornene and maleic anhydride copolymerization and terpolymerization. Results indicated that oxygen in the polymerization process produced polyperoxide, proved by NMR, TG and phenol peroxy radical trapping experiment.3. In visible light induced photocopolymerization, MA with NB was initiated spontaneous polymerization by visible light. The free radical trapping experiment, NMR and GC-MS analyses demonstrated the formation of ketyl and THF? radical in the presence of benzophenone (BP) and THF under visible light. The results of UV and copolymer structure analyses indicated that the participation of a charge transfer complex (CTC) in the photocopolymerization of maleic anhydride and norbornene is not important.4. The thermal properties and degradation behaviors of norbornene and maleic anhydride copolymer, norbornene, maleic anhydride and methyl acrylate terpolymer were investigated by thermogravimetric analysis, whose thermal stability is up to 360oC for copolymer, and 380 oC for tercopolymer, respectively.5. The effects of reaction conditions on the polymerization results by polymerizing norbornene and maleic anhydride were systematically investigated, such as the molar ratio of monomer to initiator, solvent polarity, and reaction time.6. The photocopolymerization of norbornene with maleic anhydride was successfully performed under visible light, which is more effective than that of thermal induced free radical polymerization.