Single point diamond turning techniques have been widely used in manufacturing diffractive surfaces. In this paper, the previous work of the others is summarized, the development trend and status of diamond turning and diffractive optical elements(DOES) technology in domestic and overseas are introduced, the fundamentals of DOES and its fabrication technology are overviewed. Some exploration are made on machining parameters used in diamond turning process and its impact on the element performance. And the effect of diamond turning tool shape and cutting feed on the microstructure of DOES was discussed. The relation was analyzed among total integrated scattering (TIS) caused by surface roughness of DOES, tip radii of cutting tools and cutting feed. According to the discussion and analysis, method of selection of cutting tools and cutting feed was given with the consideration of blocking effect and cutting time. The work of this paper will standardize the fabrication procedures in processing DOES with diamond cutting technique and set a solid process foundation for the application of DOES.
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