Fabrication Of Ti-O Film By Vacuum Magnetic Filtered Arc Plasma Deposition And Its Blood Compatibility

In this paper, Ti-O films were prepared on various substrates by Vacuum Magnetic Filtered Arc Plasma Deposition (VMFAPD) at different oxygen partial pressure, substrate bias and deposition temperature. The microstructure, surface wettability, sheet resistance, surface and cross section morphology, optical band gap and film thickness were investigated, respectively. The blood compatibility of films was researched by platelet adhesion and lactate dehydrogenase (LDH), and the relationship between physical, chemistry properties of films and blood compatibility was evaluated.The results showed that Ti-O films with different crystalline structure (rutile, a mixture of rutile and titanium sesquioxide) could be synthesized by VMFAPD. The microstructure of the Ti-O films mainly depended on the energy of the particles impinging on the substrate and the deposition temperature. Rutile titanium oxide was apt to be formed when oxygen partial pressure, substrate temperature, deposition temperature, and anneal temperature were increased. The sheet resistance could be controlled in large-scale by adjusting process parameters. The optical band gap of rutile titanium oxide was between 3.1-3.2eV. The Ti-O films were densed and had an excellent adhesion with the substrate and represented equiaxed structure, which could be observed under scanning electron microscope (SEM). The film thickness was reduced obviously with increasing of oxygen partial pressure.The results of the platelets adhesion indicated that the Ti-O films with rutile structure, sheet resistance 751K.Ω/□had excellent blood compatibility. The hydrophilicity of Ti-O films were influenced in a certain extent by the chemical composition, microstructure, morphology and integrity of crystals of the films. After high vacuum annealing at 800℃for 30 minutes, the crystallinity of film improved, and the contact angle decreased to 48°approximately, the blood compatibility of Ti-O films was improved with the hydrophilicity increasing.The whys and wherefores for improving anticoagulation of Ti-O films may attributed to its strong hydrophilicity. The Ti-O films strong with hydrophilicity would adhere less protein than that with hydrophobicity, and the wide forbidden band of Ti-O films prevent the denature of fibrinogen, a paramount protein which induced thrombus coagulation on the material surface, by preventing the electron transfer from the fibrinogen into the material. So the Ti-O films had preferable blood compatibility.