Preparation And Characterization Of Ag/SiO_x Nanocomposite By Plasma Technology

In the paper, with plasma technology the Ag/SiOx nanocomposite is prepared. By this method Ag particles are embedded in SiOx composite uniformly, which performs the antibacterial property.The Ag/SiOx nanocomposites are fabricated by inductively coupled plasma (ICP) enhanced magnetron sputtering where the hexamethyldisiloxane (HMDSO) is used as the monomer for SiOx deposition and Ag nanoparticles are sputtered from Ag (99.99%) target by Ar. The chemical structures and elements in the Ag/SiOx nanocomposite are characterized by Fourier transform infrared spectroscopy (FTIR), ultraviolet visible spectroscopy (UV-Visible), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD); the morphology is scanned by atomic force micrograph (AFM) and scanning electron microscopy (SEM); the surface morphology of film, the particle size and distribution are measured by high resolution transmission electron microscopy (HRTEM).The property of film is measured by water contact angle(WCA) besides of the deposition rate; As an application the antibacterial behavior of nanocomposite Ag/SiOx is examined using colon bacillus and golden brown staphylococcus. The main conclusions are:1. The preparation of SiOx film by ICP. Using inductively coupled plasma (ICP) SiOx films are prepared. The processing parameters, such as the ICP input power, the working pressure, the rate of Ar and HMDSO and deposition time, remarkably affect the chemical structures and properties.2. The preparation of Ag/SiOx nanocomposite in inductively coupled plasma (ICP) enhanced chemical vapor deposition (ICP-CVD). Using inductively coupled plasma (ICP) enhanced magnetron sputtering, and hexamethyldisiloxane (HMDSO) as the monomer, Ar as sputtering gas, Ag/SiOx nanocomposite are fabricated. The processing parameters, such as the magnetron sputtering power, the ICP input power, the proportion of Ar and HMDSO, the working pressure, the deposition time, significantly influence on the chemical structures and properties of the nanocomposite.3. The antibacterial behavior of nanocomposite Ag/SiOx. It obtains that the nanocomposites Ag/SiOx demonstrate an excellent antibiotic effect to colon bacillus and golden brown staphylococcus.