Wear And Corrosion Resistance Of TiN Film Deposited By Multi-arc Ion Plating

Titanium nitride films with different composition, microstructure and properties were synthesized by two typical techniques-multi-arc ion plating and magnetic filtered cathodic arc ion plating. The microstructure and composition were characterized with X-ray diffraction (XRD), Field emission scanning electron microscopy (FESEM) and glow discharge optical emission spectrometry (GDOES). The mechanical properties,such as wear resistance, microhardness and the adhesion strength between films and substrate,were measured with HT-2001 abrasive wear test machine, LecoM-400-H1 microhardness tester, and HH-3000 scratch tester. The corrosion resistance of films was tested with PS-168 electrochemical test system. The results are shown as following:TiN films prepared by multi-arc ion plating and magnetic filtered techhique exhibit smooth surface and dense structure columnar crystal with cascade-like glacier feature. Only TiN phase with a preferred orientation of TiN (220) is appeared in the films. The film deposited with a bias voltage of 300V and a nitrogen partial pressure of 0.6Pa shows optimal comprehensive performance such as thickness, hardness and bonding strength. A filter magnetic current of 6.5A is an optimum parameter for TiN film prepared by this magnetic filtered cathodic arc ion plating.TiN film fabricated by multi-arc ion plating shows excellent properties of anti-friction and wear resistance when other process parameters are the same, i.e. the bias voltage is 300V and the nitrogen partial pressure is 0.6Pa. TiN prepared by magnetic filtered cathodic arc ion plating shows excellent anti-friction and wear resistance when the filter magnetic current is 6.5A.The corrosion test results of TiN films under the typical ion plating process in the typical mediums of 0.5mol / l NaCl solution, 0.5mol / l H2SO4 solution and 0.5mol / l Hanks' artificial body fluid indicate that the corrosion resistance of the high-speed steel substrate can be significantly improved by coating of TiN films. The corrosion resistance of magnetic filtered surface modification layer is slightly better than non-magnetic filtered ones.