Two Dimensional Angle Sensor And Its Application In Planar Positioning System

With the rapid development of modern science and technology, ultra precision measuring technology has become more and more important. The micro displacement measurement technology gradually develop towards high-precision, wide-range and multi-dimensional displacement measurement simutaneousely. In addition, industry requires system can realize real-time, online measurement. Currently, one dimensional linear displacement measurement has been able to achieve millimeter level range, nanoscale resolution. However, it needs one measuring device for each dimension and leads to Abbe error when carries on multi-dimensional measurement. With the increasing demands of simutaneouse multi-dimensional displacement measurement, there is great significance in researching on multi-dimensional measuring system, which has many advantages, such as low cost, high-precision, wide-range and so on.In order to solve these problems, this thesis carries on related researches and develops the two-dimensional displacement measuring system with self-designed laser angle sensor and plane grid. The thesis proposes principles and measurement methods of the system. The research developed the prototype of directly decoupling two-dimensional displacement measuring system. The main research contents are as follows:Chapterâ… reviews the development status and trend of ultra-precise displacement measuring technology both at home and abroad. Then this chapter introduces new requirements for ultra-precise detection technoloy and analyzes existing problems. On the base of the problems, research purpose, significance and main contents has been released.Chapterâ…¡introduces principles of two-dimensional displacement detection system, then analyzes principle of micro-angle sensor and plane grid. Base on this, a wide range, high-precision, decoupling two-dimensional measurement method is put forward.Chapterâ…¢presents the construction of the displacement measurement system. Mainly describes design and mechanical construction of micro-angle sensor, together with the movement control method of plane grid. The second part in this chapter is the development of hardware circuit including signal detection,â… /â…¤transform, filtering module and so on. The last part is signal processing and software development of the measurement system.Chapterâ…£tests stability of hardware circuit, then verifies the performance of self-designed angle sensor through experiments. Relevant experiments are carried out to test validation of the two-dimensional micro displacement measurement system.Chapterâ…¤summarizes the research topics and prospects direction in further research.