| Due to excellent casting performance and mechanical properties ,ZL101A aluminum alloy has been widely used in automobile and motorcycle manufacturing . Because of automobile and motorcycle lightweight development, the higher request has been put forward according to performance of ZL101A aluminum alloy. Because of having good corrosion resistance ,wear resistance, resistant high temperature, low friction coefficient, good chemical stability and high hardness, TiN film has caused the domestic and foreign decoration great attention and research interests in recent years. TiN film on aluminium alloy substrate has been as the research object ,and advanced intermediate frequency non-equilibrium magnetron sputtering technology has been as the research means in this study. Micro hardness has been measured by using MH - 6 microhardness tester; TiN film thickness has been measured by using ZEISS EVO - 18 type scanning electron microscope; corrosion resistance of TiN film has been measured by using YWX/Q - 250 type salt fog test; surface roughness of TiN film has been measured by using double tube microscope. On the basis of a lot of testings, performance parameters and corresponding process of TiN film have been analysed comprehensively,and we can get the following conclusion:⑴Below the technology condition of bias voltage 180V, occupies proportion of bias voltage 55%, the current of the Arc Power 85A, the flow of nitrogen 45SCCM, vacuum 1.0 x 10-3Pa, the 950nm TiN films can be plated in one hour .⑵After magnetron sputtering coating processing, microhardness of aluminium alloy specimen surface has been higher. Below the technology condition of bias voltage 180V, occupies proportion of bias voltage 55%, the current of the Arc Power 85A, the flow of nitrogen 45SCCM, vacuum 1.0 x 10-3Pa, Surface hardness has been improved from 75.9 HV to 58.8 HV.⑶After salt fog experiment, corrosion resistance of TiN film has been higher. Below the technology condition of bias voltage 180V, occupies proportion of bias voltage 55%, the current of the Arc Power 85A, the flow of nitrogen 45SCCM, vacuum 1.0 x 10-3Pa, the corrosion resistant level of TiN film can reach to Level 10.⑷After magnetron sputtering coating processing, surface roughness of TiN film has been lower. Below the technology condition of bias voltage 180V, occupies proportion of bias voltage 55%, the current of the Arc Power 85A, the flow of nitrogen 45SCCM, vacuum 1.0 x 10-3Pa, surface roughness of TiN film has been reduced from 3.568μm to 1.443μm.⑸After performance such as hardness, thickness, corrosion resistance, surface roughness of TiN film were analysed comprehensively, and below the technology condition of bias voltage 180V, occupies proportion of bias voltage 55%, the current of the Arc Power 85A, the flow of nitrogen 45SCCM, vacuum 1.0 x 10-3Pa, TiN film on aluminium surface has the best comprehensive performance ,and the TiN film can be applied in practical life. |
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