| Micro abrasive water jet technology is a complex processing technology which combined the advantage of the precision machining technology and traditional abrasive water jet "cold" processing technology. The accuracy of the abrasive water jet machining can be achieved the orders of magnitude of the laser machining. Moreover, micro abrasive water jet extended applications range of abrasive water jet. At present, the abrasive water jet technology and various auxiliary equipments were increasingly perfect and mature. The global processing and manufacturing shift to China. New composite materials have emerged and higher accuracy product is needed. In this context, as the only "cold" and processing means, the abrasive water jet a precision has a bright future in MEMS, microelectronics, new energy, semiconductor and composite materials industry.According to the problem of unaccuracy and unstable flow of abrasive in the process of the abrasive delivery, an abrasive cutting head based on the theory of the screw pump was proposed. It`s key part is special spiral screw. It can delivery the abrasive quantitatively, actively and accuracily.The abrasive flow control equation were deduced accroding to the data of the selected parameters, which is Q1 = 4.35V-4.27. The abrasive flow test was carried out and the data of input voltage and output mass of abrasive were recorded. Moreover, the real flow control equation was deduced by the software of Matlab based on the recorded data, which is Q2 = 5.39V-16.43. The two equations were compared and analyzed. It shows that the average error and maximum error of abrasive flow rate is 1.3g.min-1 and 1.96g.min-1 respectively, the average relative error and maximum relative error of abrasive flow rate is 0.2% and 1.79% respectively. Therefore it can be used as controlling equation of the installation for precise feed micro abrasive.The three-dimensional modeling of cantilever beam was established with the software of Solidworks. Moveover, the model was analyzed using finite element. The results show that the cantilever stiffness is adequate, and the natural frequencies were 20.4Hz, 31.4Hz, 91.3Hz and 104.4 Hz respectively which varid widely comparing with the frequency of the system. It has almost little influence to cutting precision and it can be ignored.The experiment on material cutting using abrasive water jet with abrasive precise feed installation was carried out. It was showed that the surface roughness of the cutting face is greatly improved by 2.64 times with respect to traditional abrasive feed system. Therefore the newly installation for precise feed micro abrasive has great application value in precise manufacturing.
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