Research On Micro Machining Technology Of Ultraviolet Laser

Since the emergence of UV laser which has shown the advantages of photochemical effects in aspect of material processing, it has become a highlight in the field of micro machining. It is important to study the parameters of UV laser acting on various materials, and to look for the optimal parameters for the process of UV laser processing.This dissertation, initially, introduced the basic mechanism of UV laser processing, and then analyzed the all kinds of potential ablation principle and the important influence factors. Followed that, the previous establishment of mathematical model was discussed and their faced problems were analyzed respectively. In the dissertation, the important concept of ablation threshold in the UV laser processing was reformulated, then the microscopic aspects of UV laser processing, according to the significance explored in the macro and microcosmic aspect, were modeled, and the accuracy of the model for the prediction of machining was carried out. Finally, the dissertation had put up experimental work according to the analyses. Groups of contrary experiments, initially, based on sapphire, iron, titanium alloy and SiC/Al, were performed, and various parameters for processing were analyzed. Then a 25μm×25μm square groove based on the reasonable parameters, according to the law explored and the theoretical analyses, was processed.In order to research the problem of UV laser machining parameters, a database system of process parameters was established. Utilizing office access 2007 to set up the background of database on the Windows XP platform and the interface of ADODC of Visual Basic, the front-end interface connecting with the database system was programmed, which can be of considerable conveniences to the experiments and application of UV laser.