Study On Micro Wedm Using Electrostatic Induction Feeding Method

In the micro fabrication field, there are some generally method, such as LIGA, MEMS, and micro electro discharge machining method and so on. However, the processing of micro-EDM gives it the ability to all conductive material, and the advantage of non-contact ,and it ensure the machining accuracy and consistency while maintaining the premise of processing efficiency, and LIGA and MEMS high processing costs and more limited processing objects, all the reasons make micro-EDM method as the preferred processing method. In the methods of electrical discharge machining, electrical discharge grinding, electrical discharge milling and wire electrical discharge machining (WEDM), WEDM has been considered as the most commonly and effective method, it was used to process nozzle, cutting tools, cavity, wire drawing dies, and electro-optical devices.In the traditional process of micro-EDM, RC pulse power was generally used, but the minimum electric discharge energy per pulse is determined by the stray capacitance, indicating a limit to miniaturization.The electrostatic induction method been introduced to micro WEDM is a new attempt, since the method is able to eliminate the influence of stray capacitance in the pulse generator circuit, discharge energy can be minimized to accomplish micro-WEDM. This method also allows non-contact feeding of electric current to the wire electrode, realizing highly accurate micro-WEDM because there is no wear of brush and the wire vibration does not depend on the cutting direction, so it can achieve high precision micro EDM wire cutting.In this paper, the principle of micro WEDM using electrostatic induction method was analyzed, completed the experimental platform. It researched the influences of discharge polarity, working gap voltage adjustment and pulse frequency in micro WEDM using electrostatic induction method, and also realized the non-contact electric feeding to wire electrode. For the common material of electrode and the workpiece of micro WEDM, it analyzed the relevant material machining characteristics in this method. And finally put forward and implemented the method of micro-electrode array and micro-hole array horizontal on line machining, analyzed key problem of the micro hole array Horizontal Machining Technology Online processing, and found the corresponding solutions, completed a micro array electrode hole-line special matching horizontal machining fixture design and production. Using this method successfully processed 5×5 micro-electrode array and 5×5 micro-hole array, the section of each electrode is square with 8.05±0.02μm in side width and the length of each electrode is 160μm, the average side width of single-hole is 13.1±0.05μm and the distance of each hole is 45μm. Finally, micro array electrode and the array hole machining quality factors were analyzed.