Realization And Control Of Detection System For Wafer Surface Microscopic Topography

Wafer is the main material to manufacture semiconductor chip, whose quality plays an important role in the field of information. Therefore, precision measurement on the wafer topography is particularly important.In this dissertation, with a thorough research of the theory of detection system for wafer surface microscopic topography together with some analysis work on reconstruction surface algorithm for the system, I've done some analysis work on the control of the system. The design of the user interface for the system is the main duty of mine. After study on the control process of the system, I've designed the UI to control the whole system with Visual C++6.0, including the login UI, the operator management UI, the key control UI of the system and the storage UI for images. The aim of the whole work is to control the detection process automatically, to provide a friendly manual platform for users to fulfill the work detecting the surface topography of wafer.In order to integrate the part of optics hardware and its control software organically, with the consideration of easy to use, I have designed the box for the system after necessary consideration on the requirement and conditions. The integrated system now can be used to detect samples and to do the analysis work.The system employs five-step phase-extraction algorithm of insensitive and complex integral reconstruction algorithm to realize the entire processing together with some work on digital image processing to get the surface topography of the sample. We use the"finished-box"to test a given sample and get some experimental data. The UI I designed is easy to use, and the algorithm we applied is right.Experimental result indicates that the achieved system for wafer surface topography works correctly; the UI is easy to use; the system has characteristics of working in general experimental condition, anti-jamming and in nm magnitude accuracy.Finally, we point out some shortcomings of the system we have designed and we also make a document to help improve our work in future.