Study On DC Magnetron Sputtering Power Source

With the continuous development of science and technology, more and more high quality of coating production is required. The demand of production is also growing. It requires that the coating equipments have higher reliability, better stability, higher quality and efficiency. In the magnetron sputtering coating equipment, Magnetron Sputtering Power Source is one of the important equipments to ensure the quality of production. Researching good Magnetron Sputtering Power Source has important practical significance for improving the quality and efficiency of coating.In this paper, as requirements of magnetron sputtering coating equipment, a DC magnetron sputtering power source is developed, because of the technology of high-frequency power, it has many advantages that good dynamic response, wide parameter adjustment range and reliable, perfect protection, light weight, small size, high efficiency, visualization. The contents are discussed in this paper as follows:On the basis of researching a lot of relevant literature, it includes the overall program and hardware systems of input filter, three-phase SCR(Silicon Controlled Rectifier), IGBT full-bridge inverter, voltage conversion and output rectification filter.In order to reduce the volume of source and the output current ripple, in this paper, the control method of reducing surge current and control strategy of voltage conversion are discussed, simulation analysis and experimental results verify its reasonableness.For the problem of EXB841 driver circuit in the IGBT driving protection system, a new IGBT driver circuit is developed, which makes the protection of IGBT safer and more secure.For the bad overload and easy to damage of the poor power electronic devices, a functional protection system is designed, which can achieve the fault protection of IGBT over-current, output over-current, heat sink temperature, IGBT-through, phase sequence error/phase loss. The design of the high frequency transformer using Ultracrystallite alloy material is discussed in detail, by using ultracrystallite alloy material, high frequency pulse transformer of 40kW is designed.Multi-microcontroller system is designed, which makes the controlled rectifier, inverter voltage regulation and protection, parameter setting and display and remote monitoring as a system easy to debugging and extensions.